The NANOS offers high-quality SEM imaging at a low cost of ownership with integrated energy dispersive spectroscopy (EDS) for rapid elemental analysis. It is designed for easy installation, ease of use and easy servicing.

Making SEM accessible for anyone, everywhere

The NANOS represents an inclusive and economical tabletop scanning electron microscope (SEM). Crafted with state-of-the-art technology, it provides swift and high-resolution SEM imagery alongside accurate elemental analysis. Its resilient and contemporary design renders it exceptionally well-suited for applications in research and development, education, as well as various industrial purposes.

Discover NANOS, for rapid elemental analysis

Image Credit: Phe-nx

  • Configuration: The NANOS is delivered with BSD, SED, integrated EDS, and a Eucentric tilt stage.
  • Design: The NANOS has a robust modern design and is engineered using the latest materials and components.
  • Servicing: The NANOS design enables simple access for maintenance and upgrades, which could be completed at the user’s premises.
  • Robust: With outstanding stability and a compact footprint, the architecture of the NANOS ensures it can be used in non-laboratory environments.
  • Ease of use: In BASIC mode, the NANOS will produce outcomes in a short period of time, irrespective of experience. ADVANCED mode offers additional functionality for elaborate analysis.
  • Cost of ownership: The NANOS has been fabricated to keep the ownership cost lower than any benchtop SEM currently available.

Iconic Dutch design

Having been designed and manufactured in the Netherlands, the NANOS is all about quality, reliability, and user-friendliness.

Discover NANOS, for rapid elemental analysis

Image Credit: Phe-nx

Discover NANOS, for rapid elemental analysis

Image Credit: Phe-nx

Discover NANOS, for rapid elemental analysis

Image Credit: Phe-nx

Discover NANOS, for rapid elemental analysis

Image Credit: Phe-nx

Discover NANOS, for rapid elemental analysis

Image Credit: Phe-nx

Discover NANOS, for rapid elemental analysis

Image Credit: Phe-nx

Key features

  • High-Performance SE and 4 Quad BSE Detectors
  • EDX‒Spot Analysis and Element Mapping
  • Low vacuum capability available
  • Motorized XY Stage and Eucentric Tilt
  • Around 1 to 20 kV Acceleration voltage
  • Filament performance optimization
  • Low service costs
  • User-friendliness

Specifications

Source: Phe-nx

. . .
SOFTWARE Optical Magnification range: 2 – 12x
  SEM Magnification range: 50 - 200.000x
  Resolution <10 nm
ILLUMINATION Optical Bright field
  SEM Optimized thermionic source (tungsten)
  Acceleration voltages Default: 1, 2, 5, 7, 10, 15 & 20 kV
    Adjustable range between 1 & 20kV
DETECTOR   Secondary electron detector (SED)
    Backscattered electron detector (BSD) – 4 quadrant
    Energy Dispersive Spectroscopy detector (EDS) – integrated
DIGITAL IMAGE DETECTION Optical Color navigation camera
IMAGE FORMATS   JPEG, TIFF, PNG, BMP
USER INTERFACE   Communication, imaging and analysis use a single monitor with control via a wireless mouse & keyboard
    Remote control (e.g. iPad) enabled
    Basic & advanced modes
DATA STORAGE   Network, USB, workstation
SAMPLE STAGE   Eucentric tilt stage (-15 up to +40 ̊)
    Computer-controlled motorized X, Y: 25 x 25 mm
SAMPLE SIZE   25 mm diameter pin stub
    60 mm diameter round disk
EDS SPECIFICATIONS Detector type Silicon Drift Detector (SDD), thermo-electrically cooled
  Detector active area 30 mm2
  Energy resolution @ Mn Kα < 133 eV
  Max. input count rate 300,000 cps
  Hardware integration Fully embedded
SOFTWARE   Integrated in NANOS user interface
    EDS analysis and mapping
    Export functions
SYSTEM SPECIFICATIONS Imaging module 280 (w) x 630 (d) x 550 (h)
  Weight 60 kg
  Pumps Turbo molecular pump with oil free membrane pre-vacuum pump
  Vacuum modes High vacuum SEM (conventional SEM), and low vacuum 0.4 mbar (low vac SEM)
    Controlled vacuum levels via the User Interface
  Workstation Preconfigured All-in-One PC with a 27” monitor.
SEM imaging and EDS Analysis software installed

 

Eucentric Stage

The Eucentric Stage integrated into the NANOS is truly a one-of-a-kind feature, included as standard with every unit. Its motorized XY movements can be effortlessly controlled through the User Interface.

When operating in SEM mode, tilting the specimen is a simple manual adjustment of the stage. Thanks to its eucentric design, the sample remains in sharp focus, eliminating the necessity for intermediate SEM setting modifications. The User Interface accurately indicates the tilt angle, allowing samples to be tilted at angles of up to 55 degrees.

Elemental analysis

The NANOS has been fitted with a completely integrated Energy Dispersive X-Ray (EDX) Silicon Drift Detector (SDD). Through the User Interface, the operator can choose to activate Elemental Mapping or EDX Point Analysis.

Electron Detectors

The NANOS is available with both a Secondary Electron Detector (SED) and a Back Scattered Electron Detector (BSD) as standard. The BSD is a 4-quadrant detector with fully controllable independent segments. 

By using the segments in various combinations, it offers topographical or compositional detail from the sample, as well as images with a “shading effect” by highlighting the surface from several directions.

Discover NANOS, for rapid elemental analysis

Image Credit: Phe-nx

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